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NANOTECH

Best Product & Reliable Service

Products
Nanotech provides various sensor solutions for process diagnoses in high-end production
SPOES
(Self-Plasma OES)
· Detects leaks in real time
· CVD, ALD, Etch, diffusion, All TM
OES.EPD
(Sensor head)
· Endpoint detection, Analyzes plasma spectrum
· Etch, plasma treatment, PR/ACL strip, PECVD
OES.EPD
(Local Controller)
· Endpoint detection, Analyzes plasma spectrum
· Etch, plasma treatment, PR/ACL strip, PECVD
Signle F-EPD
· Endpoint detection
· PR/ACL strip
Dual F-EPD
· Endpoint detection
· PR/ACL strip
Targeted GD
· Targeted gas detection
· CVD, ALD, Etch
Plasma monitor
(Single sensor type)
· Arc detection, pulsed plasma property
· Etch, plasma treatment, PR/ACL strip
Plasma Monitor
(1D sensor type)
· Intensity distribution
· Etch, plasma treatment, PR/ACL strip
NANOTECH
Global Leader in Optical Solutons
Nanotech is a technology-oriented venture developing
sensor products based on optical and plasma diagnostic technology.
We supply process diagnostic sensors for
semiconductor/display mass production at home and abroad.
Our Technology
Optical technology
Provides cutting-edge light source/optical design services and high-efficiency light delivery technologies using Korea’s top spectral analysis technology
Plasma control and analysis technology
Nanotech holds technology for product integration, including plasma discharge optimization, vacuum equipment and signal processing and control design, software design and development technology.
Commercialization and service capabilities
Provides the finest service with customization to unique user environments, with rich experience and advanced technical support and data analysis capabilities
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About
company
Nanotech established ALTEC in 1993 with the purpose of
pioneering innovative technologies in laser optics and
optoelectronics. Since converting to a corporation in 1998,
we have grown steadily as a technology-driven specialist in
optical measurement sensors.