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NANOTECH

Best Product & Reliable Service

Products
We will provide various process diagnosis sensor solution for high quality efficiency production
SPOES
(Self-Plasma OES)
· Realtime leak detection
· CVD, ALD, Etch, diffusion, All TM
OES.EPD
(Sensor head)
· Endpoint detection, Plasmas Spectroscopic analysis
· Etch, plasma treatment, PR/ACL strip, PECVD
OES.EPD
(Local Controller)
· Endpoint detection, Plasmas Spectroscopic analysis
· Etch, plasma treatment, PR/ACL strip, PECVD
Signle F-EPD
· Endpoint detection
· PR/ACL strip
Dual F-EPD
· Endpoint detection
· PR/ACL strip
Targeted GD
· Targeted gas detection
· CVD, ALD, Etch
Plasma monitor
(Single sensor type)
· Arc detection, pulsed plasma property
· Etch, plasma treatment, PR/ACL strip
Plasma Monitor
(1D sensor type)
· Intensity distribution
· Etch, plasma treatment, PR/ACL strip
NANOTECH
Global Leader in Optical Solutons
Nanotech is the Technology-centered venture businesswhich has been manufacturing sensor product group,
making use of optical technology and plasma diagnosis technique, and has supplied the process diagnosis sensors
for mass production of semiconductor/display at home and abroad.
Our Technology
Optical Technology
We provide higher quality service, making use
of illuminant & optical design and technology,
optical delivery efficiency technic and nation’s
top spectroscopic analysis technology as well.
Plasma Control/Analysis Technology
We have own technology integrating the products
such as plasma discharge optimization technology,
vacuum equipment design technology, signal process
& control design technology and software design
and development technology
Service Ability
We provide the best-ever service based
on our customizing ability considering
the service environment, rich experience
in various design and production, professional technical support and data analysis competency.
Discover
About
company
Nanotech, since establishing ALTEC for the purpose
of developing laser optics and new technology
in photoelectronic engineering in 1993 which was then converted
to a corporation in 1998, has been increasingly growing
as the specialized company in the area
of manufacturing optical measuring sensors.