Starting pressure of discharge | 5mT~10Torr |
Detectors per a controller | 1~7 (Max. 12) |
Image sensor | 2048 pixels |
Spectral range | 200~850nm |
Optical resolution | <0.95nm @25um slit |
A/D resolution | 16bit |
Integration time | Min. 7ms |
Scan time(Interval time) | Min. 50ms |
Optical window | Sapphire |
Plasma source power | Max. 30W |
Power requirement | 3.5A/12VDC |
Operating system | Win10 |
Software | AOS (AEGIS Operating Software) |
Communication | Ethernet |
Protocol | Customizing available |
Additional pumping | N/A |
Vacuum interface | NW25 (Reducer available) |
- | - |
Model | Description | |
AEGIS-7W |
![]() ![]() |
For Transfer/Process/Anneal Chamber Contamination-free module included (patented) |
AEGIS-7S |
For Transfer/Process/Anneal Chamber Contamination-free module included (patented) Advanced sensor and signal processing |
|
AEGIS-7WD |
For Process Chamber Contamination-free module included (patented) OES module detachable type |
|
AEGIS-7DLT |
For Process Chamber Contamination-free module included (patented) For exclusive customer |
Model | Description | |
SMC-10 |
![]() |
Horizontal type 3U 19” rack mount type |
SMC-10H |
![]() |
Vertical type Stand alone type |
Model | Description |
WT | Worktable type |
RK | 19” rack type |
MC | Moving cart type |
LPA-75-AC-12 |
Local power adapter, 75W |
Application | Semiconductor | FPD | |||||||
All TM | Ti | WN | OxALD | Diffusion | Etch | All TM | Anneal | PECVD | |
Leak detection | ● | ○ | ● | ○ | ● | ○ | ● | ● | ○ |
Dry clean EPD | ● | ● | ● | ● | |||||
Source fault | ○ | ● | |||||||
Endpoint detection | ● |