products
제품
OES.EPD
반도체/디스플레이 식각 챔버 내의 plasma를 분광분석하여 etchant 또는
by-product의 변화를 감지함으로써 식각 공정의 endpoint를 검출하는 센서
by-product의 변화를 감지함으로써 식각 공정의 endpoint를 검출하는 센서
Semiconductor, LCD/OLED, LED, MEMS, logic device 등 분야
Etch, plasma treatment, PR/ACL strip, PECVD
Advanced EPD algorithms
(Differential threshold/window method/MVA)
Specifications
| Image sensor | 2048 pixels |
| Spectral range | 200~850nm |
| Optical resolution | <0.95nm @25um slit |
| A/D resolution | 16bit |
| Integration time | Min. 7ms |
| Scan time(Interval time) | Min. 50ms |
| Power requirement | 1.0A/12VDC |
| Operating system | Win10 |
| Software | NanoEPD or AOS |
| Communication | Ethernet |
| Protocol | Customizing available |
| Fiber optic | 200~1000um core |
Model
Sensor head
| Model | Description | Model | Description | |
|
|
OPTI-L20AU |
2048pixel 1D linear Normal sensor head |
OPTI-L20AU-P |
2048pixel 1D linear For exclusive customer |
| OPTI-C20A |
2048pixel 1D linear Advanced sensor and signal processing |
OPTI-B20A |
2048pixel 1D back-thinned High SN ratio |
|
| OPTI-L30A |
3648pixel 1D linear High resolution |
OPTI-B10122ATE |
1024x122pixel 2D back-thinned, TE cooled Ultra high SN ratio |
| Model | Description | |
|
|
OPTI-L20AU |
2048pixel 1D linear Normal sensor head |
| OPTI-L20AU-P |
2048pixel 1D linear For exclusive customer |
|
| OPTI-C20A |
2048pixel 1D linear Advanced sensor and signal processing |
|
| OPTI-B20A |
2048pixel 1D back-thinned High SN ratio |
|
| OPTI-L30A |
3648pixel 1D linear High resolution |
|
| OPTI-B10122ATE |
1024x122pixel 2D back-thinned, TE cooled Ultra high SN ratio |
Controller for sensor head
| Model | Description | |
| SMC-10 |
|
Horizontal type 3U 19” rack mount type |
| SMC-10H |
Vertical type Stand alone type |
|
| SMC-10H-P |
Vertical type For exclusive customer |
Local controller
| Model | Description | |
| OPTI-LC |
|
2048pixel 1D linear Normal local controller |
| OPTI-LC-N |
2048pixel 1D linear For exclusive customer |
Controller for local controller
| Model | Description | |
| SMC-10CMC |
|
Horizontal type 3U 19” rack mount type |
Accessories
| Model | Description | Model | Description |
| WT | Worktable type | LPA-15-AC-12 | Local power adapter, 15W |
| RK | 19” rack type | Fiber optic |
Customizing available SMA905 connector |
| MC | Moving cart type |
| Model | Description |
| WT | Worktable type |
| LPA-15-AC-12 | Local power adapter, 15W |
| RK | 19” rack type |
| Fiber optic |
Customizing available SMA905 connector |
| MC | Moving cart type |
Concept & Configuration
Software
Operation(NanoEPD)
Analysis(AM)
Application
Semiconductor
반도체 dry etch 공정에서의 endpoint 검출 및 plasma 공정에서의 PM 주기 확인
Poly, metal, SiN, SiO2
Plasma treatment
PR/ACL strip
Display
LCD 및 OLED dry etch 공정에서의 endpoint 검출
LCD : a-Si, n+Si, gate, passivation, PR strip
OLED : active, gate, S/D, descum, contact
LED/MEMS/VCSEL
LED/MEMS/VCSEL DRIE/ICP 공정에서의 endpoint 검출
Optical device
Power & RF device
MEMS sensor, TSV, micro lens
