products
제품
OES.EPD
반도체/디스플레이 식각 챔버 내의 plasma를 분광분석하여 etchant 또는
by-product의 변화를 감지함으로써 식각 공정의 endpoint를 검출하는 센서
Semiconductor, LCD/OLED, LED, MEMS, logic device 등 분야
Etch, plasma treatment, PR/ACL strip, PECVD
Advanced EPD algorithms
(Differential threshold/window method/MVA)
Specifications
Image sensor 2048 pixels
Spectral range 200~850nm
Optical resolution <0.95nm @25um slit
A/D resolution 16bit
Integration time Min. 7ms
Scan time(Interval time) Min. 50ms
Power requirement 1.0A/12VDC
Operating system Win10
Software NanoEPD or AOS
Communication Ethernet
Protocol Customizing available
Fiber optic 200~1000um core
Model
Sensor head
Model Description Model Description
OPTI-L20AU 2048pixel 1D linear
Normal sensor head
OPTI-L20AU-P 2048pixel 1D linear
For exclusive customer
OPTI-C20A 2048pixel 1D linear
Advanced sensor and signal processing
OPTI-B20A 2048pixel 1D back-thinned
High SN ratio
OPTI-L30A 3648pixel 1D linear
High resolution
OPTI-B10122ATE 1024x122pixel 2D back-thinned, TE cooled
Ultra high SN ratio
Model Description
OPTI-L20AU 2048pixel 1D linear
Normal sensor head
OPTI-L20AU-P 2048pixel 1D linear
For exclusive customer
OPTI-C20A 2048pixel 1D linear
Advanced sensor and signal processing
OPTI-B20A 2048pixel 1D back-thinned
High SN ratio
OPTI-L30A 3648pixel 1D linear
High resolution
OPTI-B10122ATE 1024x122pixel 2D back-thinned, TE cooled
Ultra high SN ratio
Controller for sensor head
Model Description
SMC-10
Horizontal type
3U 19” rack mount type
SMC-10H Vertical type
Stand alone type
SMC-10H-P Vertical type
For exclusive customer
Local controller
Model Description
OPTI-LC 2048pixel 1D linear
Normal local controller
OPTI-LC-N 2048pixel 1D linear
For exclusive customer
Controller for local controller
Model Description
SMC-10CMC Horizontal type
3U 19” rack mount type
Accessories
Model Description Model Description
WT Worktable type LPA-15-AC-12 Local power adapter, 15W
RK 19” rack type Fiber optic Customizing available
SMA905 connector
MC Moving cart type
Model Description
WT Worktable type
LPA-15-AC-12 Local power adapter, 15W
RK 19” rack type
Fiber optic Customizing available
SMA905 connector
MC Moving cart type
Concept & Configuration
Software
Operation(NanoEPD)
Analysis(AM)
Application
Semiconductor
반도체 dry etch 공정에서의 endpoint 검출 및 plasma 공정에서의 PM 주기 확인
Poly, metal, SiN, SiO2
Plasma treatment
PR/ACL strip
Display
LCD 및 OLED dry etch 공정에서의 endpoint 검출
LCD : a-Si, n+Si, gate, passivation, PR strip
OLED : active, gate, S/D, descum, contact
LED/MEMS/VCSEL
LED/MEMS/VCSEL DRIE/ICP 공정에서의 endpoint 검출
Optical device
Power & RF device
MEMS sensor, TSV, micro lens