products
제품
Filter EPD
对半导体ash/strip腔室内的等离子分光分析后，
可感知蚀刻剂（etchant）或反应副产物（by-product）的变化，
从而侦测刻蚀工艺的endpoint
可感知蚀刻剂（etchant）或反应副产物（by-product）的变化，
从而侦测刻蚀工艺的endpoint
PR/ACL strip
Single or dual filter type
Endpoint detection by EPD algorithm
Specifications
| Target gas | OH/CH |
| Optical resolution | 10nm |
| Installation | Direct contact on viewport |
| Operating temperature | 10~50°C |
| Power requirement | ±15VDC input |
| Dark offset | 30±5mV |
Model
Single F-EPD
|
|
Model | Description | Model | Description |
| NEFL-309S |
Gain/offset adjustable(analog VR) 55(W)X95(H)X53(D)mm |
NEFL-309SF |
Gain/offset adjustable(analog VR) Forced air cooling 55(W)X95(H)X53(D)mm |
|
|
Model | Description |
| NEFL-309S |
Gain/offset adjustable(analog VR) 55(W)X95(H)X53(D)mm |
|
| NEFL-309SF |
Gain/offset adjustable(analog VR) Forced air cooling 55(W)X95(H)X53(D)mm |
Dual F-EPD
FD20
PD20i
| Model | Description | Model | Description | |
|
|
HDPLUS -H/M/L |
Recipe setting Gain/offset adjustable(analog VR) Forced air cooling TCP/IP or analog output, 3.5” touch LCD 111(W)X89(H)X70(D)mm |
HDPLUSi |
Recipe setting Gain/offset adjustable(Digital AGC) Forced air cooling TCP/IP output, 3.5” touch LCD Enhanced amplification range, pre-calibration 129(W)X89(H)X70(D)mm |
|
FD20
PD20i
|
FD20 |
Gain/offset adjustable(analog VR) Forced air cooling 0~10VDC analog output 62(W)X94(H)X93(D)mm |
PD20i |
Enhanced sensitivity Gain/offset adjustable(analog VR) Forced air cooling TCP/IP output 106(W)x58(H)x128(D)mm |
| Model | Description | |
|
HDPLUS -H/M/L |
Recipe setting Gain/offset adjustable(analog VR) Forced air cooling TCP/IP or analog output, 3.5” touch LCD 111(W)X89(H)X70(D)mm |
|
| HDPLUSi |
Recipe setting Gain/offset adjustable(Digital AGC) Forced air cooling TCP/IP output, 3.5” touch LCD Enhanced amplification range, pre-calibration 129(W)X89(H)X70(D)mm |
|
| FD20 |
Gain/offset adjustable(analog VR) Forced air cooling 0~10VDC analog output 62(W)X94(H)X93(D)mm |
|
| PD20i |
Enhanced sensitivity Gain/offset adjustable(analog VR) Forced air cooling TCP/IP output 106(W)x58(H)x128(D)mm |
Concept & Configuration
Single filter type
Dual filter type
Firmware
