Starting pressure of discharge | 5mT~5Torr |
Sensor | Single PD |
Target wavelength | Dependent on targeted gas |
Optical resolution | 10nm(FWHM) |
Optical window | Sapphire |
Plasma source power | Max. 30W |
Power requirement | 2.0A/24VDC |
Signal output | 0~10VDC analog |
Integration time | Continuous |
Vacuum interface | NW25 (Reducer available) |
Model | Description | |
OPTI-T3 |
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IGS outer leak detection in ALD process Targeted N2 contained in atmosphere |