products
제품
Targeted GD
(Gas Detector)
Sensor which is equipped with small plasma module
to detect the specific gas discharged to exhaust line
of semiconductor /display manufacture facility’
CVD, ALD, Etch
Long-term usability without PM because it’s highly durable to pollutant
Realtime leak detection
Limited usability with less spectrum interference between the used gas and detected gas
Specifications
Starting pressure of discharge 5mT~5Torr
Sensor Single PD
Target wavelength Dependent on targeted gas
Optical resolution 10nm(FWHM)
Optical window Sapphire
Plasma source power Max. 30W
Power requirement 2.0A/24VDC
Signal output 0~10VDC analog
Integration time Continuous
Vacuum interface NW25 (Reducer available)
Model
Detector
Model Description
OPTI-T3 IGS outer leak detection in ALD process
Targeted N2 contained in atmosphere
Concept
Application
In-situ leak detection
Realtime leak detection of semiconductor
/display manufacture process chamber,
thereby preventing big accident beforehand
ALD IGS outer leak detection
Improvement of throughput