products
제품
Targeted GD
(Gas Detector)
Sensor with a small plasma module detects specific gases discharged into the exhaust lines of semiconductor/display manufacturing facilities
CVD, ALD, Etch
Pollution-resistant and durable, no PM for a long period
Detects leaks in real time
Limited use with minimal spectrum interference between used gas and detection gas
Specifications
Starting pressure of discharge 5mT~5Torr
Sensor Single PD
Target wavelength Dependent on targeted gas
Optical resolution 10nm(FWHM)
Optical window Sapphire
Plasma source power Max. 30W
Power requirement 2.0A/24VDC
Signal output 0~10VDC analog
Integration time Continuous
Vacuum interface NW25 (Reducer available)
Model
Detector
Model Description
OPTI-T3 IGS outer leak detection in ALD process
Targeted N2 contained in atmosphere
Concept
Application
In-situ leak detection
Prevents major accidents through real-time detection of
leaks in semiconductor/display manufacturing process chambers
Detects ALD IGS outer leak
Yield and throughput improvement