products
제품
Targeted GD
(Gas Detector)
传感器内置小型等离子体模块,通过分析半导体/面板生产设备的排出气体,
可以监测特定气体的状态
CVD, ALD, Etch
具有强大的抗污染能力,长期使用无需PM
实时监测泄露情况
可在应用气体与检出气体间光谱干涉轻微的情况下使用
Specifications
Starting pressure of discharge 5mT~5Torr
Sensor Single PD
Target wavelength Dependent on targeted gas
Optical resolution 10nm(FWHM)
Optical window Sapphire
Plasma source power Max. 30W
Power requirement 2.0A/24VDC
Signal output 0~10VDC analog
Integration time Continuous
Vacuum interface NW25 (Reducer available)
Model
Detector
Model Description
OPTI-T3 IGS outer leak detection in ALD process
Targeted N2 contained in atmosphere
Concept
Application
In-situ leak detection
可实时监测半导体/面板设备的工艺腔室是否有泄露,
从而预防发生大型事故。
可以进行 ALD IGS 外部泄漏检测
改善产品的yield与throughput