S/W DEVELOPMENT
S/W 개발 기술
S/W Support
SW development technologies
are summarized as follows.
01
Independently-developed S/W
Independently-developed S/W using Nanotech technology that allows customizing
Communication and data management system by client is achievable
02
Realtime trend analysis and management by process gas element is easy
Various recipe Setting by process andconfirmation of Full Spectrum and Time Trend in real-time
Optimal EPD wavelength is selectable
03
Optimal EPD wavelength is selectable
Easy data management through algorithm such asLifetime, Interlock and EPD
SYSTEM PREVIEW