S/W DEVELOPMENT
S/W 개발 기술
S/W Support
Introduction to S/W development technology
01
In-house S/W development
Customization with S/W developed using Nanotech technology
Communication and date management system by customer
02
Real-time trend analysis and easy management by process gas element
Enables Recipe Setting using various processes, and real-time checking of full spectrum and time trends
Choosing the optimal EPD wavelength
03
Algorithm by equipment company
Easy data management through algorithm, e.g., Lifetime, Interlock, EPD
SYSTEM PREVIEW